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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 3 A, 2000, Pages 1203-1209

Effects of electrodes on the electric properties of Pb(Zr,Ti)O3 films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

(3) Chung, Su Ock a Lee, Hee Chul a Lee, Won Jong a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

CVD; Electrode; Fatigue; Leakage current; PZT

Indexed keywords

CAPACITORS; CURRENT DENSITY; ELECTRIC PROPERTIES; ELECTRODES; ELECTRON CYCLOTRON RESONANCE; LEAKAGE CURRENTS; NUCLEATION; PEROVSKITE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLARIZATION; RUTHENIUM COMPOUNDS; SEMICONDUCTING LEAD COMPOUNDS;

BOTTOM ELECTRODES; LEAD ZIRCONATE TITANATE CAPACITORS; LEAD ZIRCONATE TITANATE FILMS; LEAKAGE CURRENT DENSITY; RUTHENIUM OXIDE;

THIN FILMS;

EID: 0033734372 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.1203 Document Type: Article

Times cited : (21)

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