Preparation of PZT on diamond by pulsed laser deposition with Al2O3 buffer layer

Thin Solid Films

Volumn 415, Issue 1-2, 2002, Pages 64-67

  Wan, Qing ^a,b   Zhang, Ninglin ^a   Wang, Lianwei ^a   Shen, Qinwo ^a   Lin, Chenglu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF PHYSICS   (China)

Author keywords

Al2O3 buffer layer; Diamond; Pb(Zr0.52Ti0.48)O3; Pulsed laser deposition; Surface acoustic wave

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINA; LEAD COMPOUNDS; PEROVSKITE; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; VACUUM; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

BUFFER LAYERS;

FERROELECTRIC THIN FILMS;

EID: 0036671732     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00495-9     Document Type: Article

References (14)