Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 243-247

  Millon, C ^a   Malhaire, C ^a   Dubois, C ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

Microsystem; Out diffusion; PZT; SIMS; TiOx

Indexed keywords

ATOMIC FORCE MICROSCOPY; CESIUM; DIFFUSION; ELECTRODES; MICROACTUATORS; MOLECULAR ORIENTATION; PLATINUM; POSITIVE IONS; RAPID THERMAL ANNEALING; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS; THIN FILMS; TITANIUM; X RAY DIFFRACTION ANALYSIS;

PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC TRANSDUCERS;

EID: 0036557765     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00081-1     Document Type: Article

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