Piezoelectric actuation for application in RF-MEMS switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 174-180

  Klaasse, Gerard ^a,b   Puers, Bob ^b   Tilmans, Harrie A C ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

A1N; Actuator; Piezoelectric; RF MEMS; Switch

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; CAPACITORS; DATA REDUCTION; ELECTRIC POTENTIAL; PIEZOELECTRIC DEVICES; SWITCHES; WIRELESS TELECOMMUNICATION SYSTEMS;

ALUMINIUM NITRIDE (ALN); PIEZOELECTRIC ACTUATION; PIEZOELECTRIC COEFFICIENTS; RF-MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 8844243387     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545687     Document Type: Conference Paper

References (10)

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