Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 387-412

  Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

MEMS; Nanomaterials characterization; Nanomechanics; Nanotechnology; NEMS

Indexed keywords

BIOLOGICAL MATERIALS; FRICTION; MICROELECTROMECHANICAL DEVICES; SUBSTRATES; WEAR OF MATERIALS;

DIGITAL MICROMIRROR DEVICES (DMD); MICRO/NANOELECTROMECHANICAL SYSTEMS (MEMS/NEMS); NANOMATERIALS CHARACTERIZATION; NANOMECHANICS;

NANOTECHNOLOGY;

EID: 33846935162     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.059     Document Type: Article

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