Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 804-810

  Lee, Kang Kug ^a   Bhushan, Bharat ^a   Hansford, Derek ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTRIBOLOGICAL CHARACTERIZATION; PROTEIN ADSORPTION; VAPOR PHASE DEPOSITION;

ADSORPTION; ELECTROMECHANICAL DEVICES; ELLIPSOMETRY; HYDROPHOBICITY; PROTEINS; SILICON; TRIBOLOGY; ULTRATHIN FILMS;

PLASTIC FILMS;

EID: 31044434243     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1861939     Document Type: Conference Paper

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