Microfabrication and nanomechanical characterization of polymer microelectromechanical system for biological applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 811-819

  Wei, Guohua ^a   Bhushan, Bharat ^a   Ferrell, Nicholas ^a   Hansford, Derek ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DE-IONIZED WATER; NANOINDENTATION TECHNIQUE; NANOMECHANICAL CHARACTERIZATION; POLYMER BEAMS;

BIOMECHANICS; BIOSENSORS; CREEP; ELASTIC MODULI; HARDNESS; IONIZATION; MICROELECTROMECHANICAL DEVICES; PLASTIC FILMS; POLYMETHYL METHACRYLATES;

POLYMERS;

EID: 31044437795     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1861937     Document Type: Conference Paper

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