Towards the integration of carbon nanotubes in microelectronics

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1296-1300

  Graham, A P ^a   Duesberg, G S ^a   Seidel, R ^a   Liebau, M ^a   Unger, E ^a   Kreupl, F ^a   Honlein W ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Chemical vapour deposition; Electrical properties; Electronic device structures; Nanotubes

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; LITHOGRAPHY; MICROELECTRONICS; NETWORKS (CIRCUITS); TRANSISTORS;

INTERCONNECTS; LARGE-SCALE INTEGRATION;

DIAMONDS;

DIAMOND;

EID: 2442560262     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.10.080     Document Type: Article

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