Techniques to study the reliability of metal RF MEMS capacitive switches

Microelectronics Reliability

Volumn 42, Issue 9-11, 2002, Pages 1789-1794

  De Wolf, I ^a   Van Spengen, W M ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY;

DIELECTRIC CHARGING; LIFETIME TESTING; OPTICAL INSPECTION; RF MEMS CAPACITIVE SWITCHES; RF-MEMS;

SCANNING ELECTRON MICROSCOPY;

EID: 0037893785     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00232-9     Document Type: Conference Paper

References (12)

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