Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2262-2296

  Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FRICTION; LOADS (FORCES); LUBRICATION; MAGNETIC STORAGE; NANOTECHNOLOGY; STICTION; SURFACE PROPERTIES; WEAR OF MATERIALS; WETTING;

CANTILEVER BEAM ARRAY TECHNIQUES; MAGNETIC STORAGE DEVICES; STATIC FRICTION;

MICROELECTRONICS;

EID: 0942289266     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1627336     Document Type: Article

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