Characterization of nanomechanical and nanotribological properties of digital micromirror devices

Nanotechnology

Volumn 15, Issue 12, 2004, Pages 1785-1791

  Bhushan, Bharat ^a   Liu, Huiwen ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELASTICITY; FRICTION; INTERFACES (MATERIALS); MIRRORS; NANOSTRUCTURED MATERIALS; TRIBOLOGY;

LANDING SITES; MICROMIRROR DEVICES; NANOTRIBOLOGY; SPRING TIPS;

DIGITAL DEVICES;

EID: 11144351035     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/12/016     Document Type: Article

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