Surface modification of silicon and polydimethylsiloxane surfaces with vapor-phase-deposited ultrathin fluorosilane films for biomedical nanodevices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1197-1202

  Bhushan, Bharat ^a   Hansford, Derek ^a   Lee, Kang Kug ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL NANODEVICES; FLUOROSILANE FILMS; LIQUID-PHASE DEPOSITION; VAPOR-PHASE DEPOSITION;

ADSORPTION; ATOMIC FORCE MICROSCOPY; DEPOSITION; HYDROPHOBICITY; SILICON COMPOUNDS; SURFACE ROUGHNESS; ULTRATHIN FILMS;

BIOMEDICAL EQUIPMENT;

EID: 33645911403     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2167077     Document Type: Article

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