Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 238-247

  Hankins, Matthew G ^a   Resnick, Paul J ^a   Clews, Peggy J ^a   Mayer, Thomas M ^a   Wheeler, David R ^a   Tanner, Danelle M ^a   Plass, Richard A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Atomic layer deposition; MEMS; Micromachines; SAMS; Self assembled monolayers; Stiction

Indexed keywords

AMINO ACIDS; CHEMICAL VAPOR DEPOSITION; HYDROPHOBICITY; POLYSILICON; SELF ASSEMBLY; SILANES; SURFACES;

ATOMIC LAYER DEPOSITION;

MICROELECTROMECHANICAL DEVICES;

EID: 0038397338     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478206     Document Type: Conference Paper

References (13)

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10. M. G. Hankins, P. J. Clews, unpublished results of a study from which single crystal silicon samples included in MEMS fabrication runs were imaged by atomic force microscopy.
11. T. M. Mayer, M. P. de Boer, N. D. Shinn, P. J. Clews and T. A. Michalske, "Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems," J. Vac. Sci. Technol. B, 18, pp. 2433-2440, 2000.
12. th annual AVS Symposium, New Mexico Chapter, May, 2002. Films made with chlorosilane and aminosilane precursors were subjected to 90-percent relative humidity for 15 hours. Subsequently, atomic force microscopy was used to image the sample surface. The precursor aggregated into mounds on the surface of samples made with chlorosilane precursors. The aggregation did not occur after an anneal step at 125° C. The films made with the aminosilane precursor did not aggregate, either with or without the anneal step.
13. P. J. Resnick and M. G. Hankins, unpublished results of over 800 microengine lifetime tests. The lifetime of microengines was tested at 1720 Hertz on samples containing more than one microengine. Some parts were tested before the coating was applied and some after the VSAMS coating was applied. The figures given here are rounded values. The microengine design used in this test exhibits one of the shortest lifetimes of any SUMMiT V™ design. Improvements in processing may have reduced the coefficient of variance of VSAMS parts from what is indicated by this study.