Designing for MEMS reliability

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 296-299

  Arney, Susanne ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001353530     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.63     Document Type: Article

References (52)

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