Complex optical surfaces formed by replica molding against elastomeric masters

Science

Volumn 273, Issue 5273, 1996, Pages 347-349

  Xia, Younan ^a   Kim, Enoch ^a   Zhao, Xiao Mei ^a   Rogers, John A ^a   Prentiss, Mara ^b   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DEFORMATION; DIFFRACTION GRATINGS; ELASTOMERS; FABRICATION; LENSES; MICROSTRUCTURE; OPTICAL MATERIALS; PLASTICS MOLDING; SCANNING ELECTRON MICROSCOPY; SURFACES; ULTRAVIOLET RADIATION;

ELASTOMERIC MASTER; OPTICAL SURFACES; POLYDIMETHYLSILOXANE; REPLICA MOLDING; RHOMBIC MICROLENSES;

ORGANIC POLYMERS;

ELASTOMER;

ARTICLE; CROSS LINKING; OPTICAL INSTRUMENTATION; PRIORITY JOURNAL; STRETCHING;

EID: 8944257381     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.273.5273.347     Document Type: Article

References (25)

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10. Sylgard 184 (Dow Corning, A:B = 1:20) silicone elastomer was used. It was cured at room temperature for ∼2 hours and then at ∼65°C for ∼6 hours. Ultraviolet-curable PU (NOA-73; Norland Products, New Brunswick, NJ) was cured with a medium-pressure mercury vapor lamp (450 W, ACE Glass, Louisville, KY) for ∼20 min, with the lamp positioned ∼2 cm from the sample. Blazed gratings were obtained from Edmund Scientific.
11. Computer simulation was done with PDEase2, Finite Element Analysis for Partial Differential Equations, version 2.5.2.
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14. 0 is the period at z = 0; the diffraction angles so calcu-lated were in agreement with the measured values.
15. PDMS prepolymer reaction mixture (Sylgard 184, A:B = 1:15) about 1 mm thick was poured over a rigid master that was placed in a plastic petri dish. The PDMS was cured in an oven for ∼5 hours at ∼65°C. A glass tube (∼4 cm long) was then vertically placed on the top of the cured PDMS, and PDMS prepolymer reaction mixture (A:B = 1:10) ∼0.5 cm thick was added. The glass tube was pressed against the first layer of PDMS with Scotch tape, and no fresh PDMS prepolymer reaction mixture could enter the glass tube. The whole system was cured at room temperature for ∼12 hours and then at ∼65°C for ∼5 hours. Adhesion between the second layer of PDMS and the glass was good.
16. The master was fabricated according to a three-stage procedure (5, 12): (i) the first used microcontact printing to form lines of hexadecanethiolate on a silver surface; (ii) the second used microcontact printing to print lines of hexadecanethiolate perpendicular to the lines of (i) on the same silver surface; (iii) the third assembled liquid prepolymer reaction mixture of PU onto the bare regions of the silver surface and cured the liquid PU under an ultraviolet light.
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25. Supported in part by the Office of Naval Research, the Advanced Research Projects Agency, and the National Science Foundation (NSF) (PHY 9312572). This work made use of Materials Research Science and Engineering Center Shared Facilities supported by NSF (grant DMR-9400396). The work of J.A.R. was supported by the Harvard University Society of Fellows. We thank Y. Lu and S. Shepard for assistance with SEM and photolithographic instruments.