Controlling sidewall smoothness for micromachined Si mirrors and lenses

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4080-4084

  Juan, W H ^a   Pang, S W ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005940052     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588595     Document Type: Article

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