High-aspect-ratio Si vertical micromirror arrays for optical switching

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 207-212

  Juan, W H ^b   Pang, S W ^a,b  

^a IEEE   (United States)

^b The Department of Civil and Environmental Engineering   (United States)

Author keywords

Deep Si etch; Optical switching; Resonators; Vertical mirrors

Indexed keywords

ASPECT RATIO; ELECTROSTATIC DEVICES; ETCHING; GOLD; MAGNETRON SPUTTERING; MIRRORS; NATURAL FREQUENCIES; OPTICAL RESONATORS; OPTICAL SWITCHES; PROTECTIVE COATINGS; SEMICONDUCTING SILICON;

VERTICAL SILICON MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099927     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679383     Document Type: Article

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