High-aspect-ratio Si vertical micromirror arrays for optical switching

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 207-212

  Juan, W H ^b   Pang, S W ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Deep Si etch; Optical switching; Resonators; Vertical mirrors

Indexed keywords

ASPECT RATIO; ELECTROSTATIC DEVICES; ETCHING; GOLD; MAGNETRON SPUTTERING; MIRRORS; NATURAL FREQUENCIES; OPTICAL RESONATORS; OPTICAL SWITCHES; PROTECTIVE COATINGS; SEMICONDUCTING SILICON;

VERTICAL SILICON MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099927     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679383     Document Type: Article

References (23)

1. R. L. Carroll, "Optical architecture and interface lightguide unit for fiber-to-the-home feature of the AT&T SLC series 5 carrier system," J. Lightwave Technol., vol. 7, pp. 1727-1732, 1989.
2. R. S. Nagaoka and Y. Suzuki, "Compact optomechanical switches and their applications in optical communication and testing systems," in IEEE Proc. Micro Electro Mechanical Syst. (MEMS'97), Nagoya, Japan, Feb. 1997, pp. 366-371.
3. L. A. Field, D. L. Burriesci, P. R. Robrish, and R. C. Ruby, "Micromachined 1 x 2 optical fiber switch," in Proc. 8th Int. Conf. Solid-State Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 1995, pp. 344-347.
4. E. Ollier, P. Labeye, and P. Mottier, "A micro-opto-mechanical switch for optical fiber networks," in Proc. SPIE, vol. 2401, 1995, pp. 116-124.
5. M. F. Dautartas, A. M. Benzoni, Y. C. Chen, G. E. Blonder, B. H. Johnson, C. R. Paola, E. Rice, and Y.-H. Wong, "A silicon-based moving-mirror optical switch," J. Lightwave Technol., vol. 10, pp. 1078-1084, 1992.
6. N. A. Riza and D. L. Polla, "Micromechanical fiber-optic switches for optical networks," in Proc. SPIE, vol. 1793, 1992, pp. 108-126.
7. J. Mohr, M. Kohl, and W. Menz, "Micro optical switching by electrostatic linear actuators with large displacements," in Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers'93), Yokohama, Japan, June 1993, pp. 120-123.
8. H. Toshiyoshi and H. Fujita, Electrostatic micro torsion mirrors for an optical switch matrix," IEEE J. Microelectromech. Syst., vol. 5, no. 4, pp. 231-237, 1996.
9. J. B. Sampsell, "Digital micromirror device and its application to projection displays," J. Vac. Sci. Technol., vol. B, no. 12, pp. 3242-3246, 1994.
10. K. A. Honor, N. I. Maluf, E. Martinez, and G. T. A. Kovacs, "A high-resolution laser-based deflection measurement system for characterizing aluminum electrostatic actuators," in Proc. 8th Int. Conf. Solid-State Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 1995, pp. 308-311.
11. Y. Uenishi, M. Tsugai, and M. Mehregany, "Micro-opto-mechanical devices fabricated by anisotropic etching of (110) Si," in IEEE Proc. Micro Electro Mechanical Syst. (MEMS'94), Oiso, Japan, Jan. 1994, pp. 319-324.
12. W. H. Juan and S. W. Pang, "Released Si microstructures fabricated by deep etching and shallow diffusion," IEEE J. Microelectromech. Syst., vol. 5, no. 1, pp. 18-23, 1996.
13. H. A. Haus, Waves and Fields in Optoelectronics. Englewood Cliffs, NJ: Prentice-Hall, 1984.
14. A. L. Pisano, "Resonant structures micromotors," in IEEE Proc. Workshop on Micro Electro Mechanical Syst. (MEMS'89), Salt Lake City, UT, Feb. 1989, pp. 44-48.
15. A. L. Pisano and Y.-H. Cho, "Mechanical design issues in laterally-driven microstructures," in Proc. 5th Int. Conf. Solid-State Sensors and Actuators (Transducers'89), Montreux, Switzerland, June 1989, pp. 1060-1064.
16. W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, "Laterally driven polysilicon resonant microstructures," Sens. Actuators, vol. A 20, pp. 25-32, 1989.
17. J. M. Gere and S. P. Timoshenko, Mechanics of Materials, 3rd ed. Boston, MA: PWS-Kent, 1990.
18. Y. B. Gianchandani and K. Najafi, "A bulk silicon dissolved wafer process for microelectromechanical devices," IEEE J. Microelectromech. Syst., vol. 1, no. 2, pp. 77-85, 1992.
19. R. I. Pratt, G. C. Johnson, R. T. Howe, and J. C. Chang, "Micromechanical structures for thin film characterization," in Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers'91), San Francisco, CA, June 1991, pp. 205-208.
20. C. Marxer, M.-A. Grȩ́tillat, N. F. de Rooij, R. Bättig, O. Anthamatten, B. Valk, and P. Vogel, "Vertical mirrors fabrication by reactive ion etching for fiber optical switching applications," in Proc. IEEE Workshop on Micro Electro Mechanical Syst. (MEMS'97), Nagoya, Japan, Feb. 1997, pp. 49-54.
21. W. H. Juan and S. W. Pang, "Controlling sidewall smoothness for micromachined Si mirrors and lenses, J. Vac. Sci. Technol., vol. B 14, pp. 4080-4084, 1996.
22. S. S. Lee, E. Motamedi, and M. C. Wu, "Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems," in Proc. Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 85-88.
23. J. W. Weigold and S. W. Pang, "Fabrication of thick Si resonators with a frontside-release etch-diffusion process," IEEE J. Microelectromech. Syst., vol. 7, no. 2, pp. 201-206, 1998.