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Journal of Photopolymer Science and Technology

Volumn 19, Issue 4, 2006, Pages 507-514

Evaluation of resist capability for EUV lithography

(8) Oizumi, Hiroaki a,b Tanaka, Yuusuke a Shiono, Daiju c Hirayama, Taku c Hada, Hideo c Onodera, Junichi c Yamaguchi, Atsuko d Nishiyama, Iwao a

a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET (Japan)

b KYUSHU INSTITUTE OF TECHNOLOGY (Japan)

c TOKYO OHKA KOGYO CO LTD (Japan)

d HITACHI LTD (Japan)

Author keywords

Cholate derivatives; EUV lithography; Molecular resists; Polyphenol

Indexed keywords

EID: 33748449444 PISSN: 09149244 EISSN: 13496336 Source Type: Journal
DOI: 10.2494/photopolymer.19.507 Document Type: Article

Times cited : (9)

References (42)

1
- 0034763264
- P. J. Silverman, Proc. SPIE 4343 (2001) 12.
- (2001) Proc. SPIE , vol.4343 , pp. 12
- Silverman, P.J.¹

2
- 33748475763
- 7-9 November, San Diego
- K. Kemp, presented at the 4th International EUV symposium, 7-9 November, 2005, San Diego.
- (2005) 4th International EUV Symposium
- Kemp, K.¹

3
- 0141500074
- W. Hinsberg, F. Houle, M. Sanchez, J. Hoffnagle, G. Wallraff, D. Medeiros, G. Gallatin and J. Cobb, Proc. SPIE 5039 (2003) 1.
- (2003) Proc. SPIE , vol.5039 , pp. 1
- Hinsberg, W.¹ Houle, F.² Sanchez, M.³ Hoffnagle, J.⁴ Wallraff, G.⁵ Medeiros, D.⁶ Gallatin, G.⁷ Cobb, J.⁸

4
- 0001512129
- J. Fujita, Y. Ohnishi, Y. Ochiai and S. Matsui, Appl. Phys. Lett. 68 (1996) 1297.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1297
- Fujita, J.¹ Ohnishi, Y.² Ochiai, Y.³ Matsui, S.⁴

5
- 0001379665
- M. Ueda, D. Takahashi, T. Nakayama and O. Haba, Chem. Mater. 10 (1998) 2230.
- (1998) Chem. Mater. , vol.10 , pp. 2230
- Ueda, M.¹ Takahashi, D.² Nakayama, T.³ Haba, O.⁴

6
- 0009454023
- N. Kihara, S. Saito, T. Ushirogouchi and M. Nakase, J. Photopolym. Sci. Technol. 11 (1998) 553.
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 553
- Kihara, N.¹ Saito, S.² Ushirogouchi, T.³ Nakase, M.⁴

7
- 0342986805
- S. Uchino, J. Yamamoto, S. Migitaka, K. Kojima, M. Hashimoto and H. Shiraishi, J. Vac. Sci. Technol. B16 (1998) 3684.
- (1998) J. Vac. Sci. Technol. , vol.B16 , pp. 3684
- Uchino, S.¹ Yamamoto, J.² Migitaka, S.³ Kojima, K.⁴ Hashimoto, M.⁵ Shiraishi, H.⁶

8
- 0034248790
- D. C. Tully, A. R. Trimble and J. M. J. Frechet, Adv. Mater. 12 (2000) 1118.
- (2000) Adv. Mater. , vol.12 , pp. 1118
- Tully, D.C.¹ Trimble, A.R.² Frechet, J.M.J.³

9
- 0034314732
- A.P.G. Robinson, R.E. Palmer, T. Tada, T. Kanayama, M. T. Allen, J. A. Preece and K. D. M. Harris, J. Vac. Sci. Technol. B18 (2000) 2730.
- (2000) J. Vac. Sci. Technol. , vol.B18 , pp. 2730
- Robinson, A.P.G.¹ Palmer, R.E.² Tada, T.³ Kanayama, T.⁴ Allen, M.T.⁵ Preece, J.A.⁶ Harris, K.D.M.⁷

10
- 0034764021
- T. Kadota, M. Yoshiiwa, H. Kageyama, F. Wakaya, K. Gamo and Y. Shirota, Proc. SPIE 4345 (2001) 891.
- (2001) Proc. SPIE , vol.4345 , pp. 891
- Kadota, T.¹ Yoshiiwa, M.² Kageyama, H.³ Wakaya, F.⁴ Gamo, K.⁵ Shirota, Y.⁶

11
- 0037027258
- J.-B. Kim, H.-J. Yun and Y.-G. Kwon, Chem. Lett. 10 (2002) 1064.
- (2002) Chem. Lett. , vol.10 , pp. 1064
- Kim, J.-B.¹ Yun, H.-J.² Kwon, Y.-G.³

12
- 17944391956
- S. Saito, N. Kihara and T. Ushirogouchi, Microelectron. Eng. 61-62 (2002) 777.
- (2002) Microelectron. Eng. , vol.61-62 , pp. 777
- Saito, S.¹ Kihara, N.² Ushirogouchi, T.³

13
- 3142631823
- T. Hirayama, D. Shiono, H. Hada, J. Onodera and M. Ueda, J. Photopolym. Sci. Technol. 17 (2004) 435.
- (2004) J. Photopolym. Sci. Technol. , vol.17 , pp. 435
- Hirayama, T.¹ Shiono, D.² Hada, H.³ Onodera, J.⁴ Ueda, M.⁵

14
- 33745635505
- S. Chang, D. Yang, J. Dai, N. Felix, D. Bratton, K. Tsuchiya, Y. Kwark, J. Bravo, C. Ober, H. Cao and H. Deng, Proc SPIE 5753 (2005) 5.
- (2005) Proc SPIE , vol.5753 , pp. 5
- Chang, S.¹ Yang, D.² Dai, J.³ Felix, N.⁴ Bratton, D.⁵ Tsuchiya, K.⁶ Kwark, Y.⁷ Bravo, J.⁸ Ober, C.⁹ Cao, H.¹⁰ Deng, H.¹¹

15
- 24644451956
- T. Fedynyshyn, R. Sinta, I. Pottebaum and A. Cabral, Proc. SPIE 5753 (2005) 281.
- (2005) Proc. SPIE , vol.5753 , pp. 281
- Fedynyshyn, T.¹ Sinta, R.² Pottebaum, I.³ Cabral, A.⁴

16
- 31844440098
- T. Hirayama, D. Shiono, S. Matsumaru, T. Ogata, H. Hada, J. Onodera, T. Arai, T. Sakamizu, A. Yamaguchi, H. Shiraishi, H. Fukuda and M. Ueda, Jpn. J. Appl. Phys. 44 (2005) 5484.
- (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 5484
- Hirayama, T.¹ Shiono, D.² Matsumaru, S.³ Ogata, T.⁴ Hada, H.⁵ Onodera, J.⁶ Arai, T.⁷ Sakamizu, T.⁸ Yamaguchi, A.⁹ Shiraishi, H.¹⁰ Fukuda, H.¹¹ Ueda, M.¹²

17
- 33748466237
- in press
- D. Shiono, T. Hirayama, H. Hada, J. Onodera, T. Arai, T. Sakamizu, A. Yamaguchi, K. Kojima, H. Shiraishi and H. Fukuda, Jpn. J. Appl. Phys. 45 (2006) in press.
- (2006) Jpn. J. Appl. Phys. , vol.45
- Shiono, D.¹ Hirayama, T.² Hada, H.³ Onodera, J.⁴ Arai, T.⁵ Sakamizu, T.⁶ Yamaguchi, A.⁷ Kojima, K.⁸ Shiraishi, H.⁹ Fukuda, H.¹⁰

18
- 33748280238
- A.P.G. Robinson, H.M. Zaid, F.P. Gibbons, R.E. Palmer, M. Manickam, J.A. Preece, R. Brainard, T. Zampini and K. O'Connell, Microelectron. Eng. 83 (2006) 1115.
- (2006) Microelectron. Eng. , vol.83 , pp. 1115
- Robinson, A.P.G.¹ Zaid, H.M.² Gibbons, F.P.³ Palmer, R.E.⁴ Manickam, M.⁵ Preece, J.A.⁶ Brainard, R.⁷ Zampini, T.⁸ O'Connell, K.⁹

19
- 24644470782
- T. Oshino, M. Shiraishi, N. Kandaka, K. Sugisaki, H. Kondo, K. Ota, K. Mashima, K. Murakami, H. Oizumi, I. Nishiyama and S. Okazaki, Proc. SPIE 4688 (2002) 716.
- (2002) Proc. SPIE , vol.4688 , pp. 716
- Oshino, T.¹ Shiraishi, M.² Kandaka, N.³ Sugisaki, K.⁴ Kondo, H.⁵ Ota, K.⁶ Mashima, K.⁷ Murakami, K.⁸ Oizumi, H.⁹ Nishiyama, I.¹⁰ Okazaki, S.¹¹

20
- 19944430107
- T. Oshino, S. Takahashi, T. Yamamoto, T. Miyoshi, M. Shiraishi, T. Komiya, N. Kandaka, H. Kondo, K. Mashima, K. Nomura, K. Murakami, T. Okuyama, H. Oizumi, I. Nishiyama and S. Okazaki, J. Vac. Sci. Technol. B22 (2004) 2975.
- (2004) J. Vac. Sci. Technol. , vol.B22 , pp. 2975
- Oshino, T.¹ Takahashi, S.² Yamamoto, T.³ Miyoshi, T.⁴ Shiraishi, M.⁵ Komiya, T.⁶ Kandaka, N.⁷ Kondo, H.⁸ Mashima, K.⁹ Nomura, K.¹⁰ Murakami, K.¹¹ Okuyama, T.¹² Oizumi, H.¹³ Nishiyama, I.¹⁴ Okazaki, S.¹⁵

21
- 24644503076
- H. Oizumi, Y. Tanaka, F. Kumasaka, I. Nishiyama, H. Kondo, M. Shiraishi, T. Oshino, K. Sugisaki and K. Murakami, Proc. SPIE 5751 (2005) 102.
- (2005) Proc. SPIE , vol.5751 , pp. 102
- Oizumi, H.¹ Tanaka, Y.² Kumasaka, F.³ Nishiyama, I.⁴ Kondo, H.⁵ Shiraishi, M.⁶ Oshino, T.⁷ Sugisaki, K.⁸ Murakami, K.⁹

22
- 33748451002
- Y. Tanaka, H. Oizumi, T. Hashimoto, F. Kumasaka, I. Nishiyama, T. Abe, H. Mohri and N. Hayashi, Proc. SPIE 5751 (2005) 102.
- (2005) Proc. SPIE , vol.5751 , pp. 102
- Tanaka, Y.¹ Oizumi, H.² Hashimoto, T.³ Kumasaka, F.⁴ Nishiyama, I.⁵ Abe, T.⁶ Mohri, H.⁷ Hayashi, N.⁸

23
- 33748269339
- H. Oizumi, F. Kumasaka, Y. Tanaka, T. Hirayama, D. Shiono, H. Hada, J. Onodera, A. Yamaguchi and I. Nishiyama, Microelectron. Eng. 83 (2006) 1107.
- (2006) Microelectron. Eng. , vol.83 , pp. 1107
- Oizumi, H.¹ Kumasaka, F.² Tanaka, Y.³ Hirayama, T.⁴ Shiono, D.⁵ Hada, H.⁶ Onodera, J.⁷ Yamaguchi, A.⁸ Nishiyama, I.⁹

24
- 0000667963
- T. Hosokawa, T. Kitayama, T. Hayasaka, S. Ido, Y. Uno, A. Shibayama, J. Nakata, K. Nishimura and M. Nakajima, Rev. Sci. Instrum. 60 (1989) 1783.
- (1989) Rev. Sci. Instrum. , vol.60 , pp. 1783
- Hosokawa, T.¹ Kitayama, T.² Hayasaka, T.³ Ido, S.⁴ Uno, Y.⁵ Shibayama, A.⁶ Nakata, J.⁷ Nishimura, K.⁸ Nakajima, M.⁹

25
- 0033698635
- H. Komatsuda, Proc. SPIE 3997 (2000)765.
- (2000) Proc. SPIE , vol.3997 , pp. 765
- Komatsuda, H.¹

26
- 19944427110
- T. Abe, M. Nishiguchi, T. Amano, T. Motonaga, S. Sasaki, H. Mohri, N. Hayashi, Y. Tanaka, H. Yamanashi and I. Nishiyama, Proc. SPIE 5446 (2004) 832.
- (2004) Proc. SPIE , vol.5446 , pp. 832
- Abe, T.¹ Nishiguchi, M.² Amano, T.³ Motonaga, T.⁴ Sasaki, S.⁵ Mohri, H.⁶ Hayashi, N.⁷ Tanaka, Y.⁸ Yamanashi, H.⁹ Nishiyama, I.¹⁰

27
- 19844371227
- Y. Tanaka, I. Nishiyama, T. Abe, S. Sasaki and N. Hayashi, Proc. SPIE 5567 (2004) 1377.
- (2004) Proc. SPIE , vol.5567 , pp. 1377
- Tanaka, Y.¹ Nishiyama, I.² Abe, T.³ Sasaki, S.⁴ Hayashi, N.⁵

28
- 19844365082
- T. Abe, M. Nishiguchi, T. Amano, T. Motonaga, S. Sasaki, H. Mohri, N. Hayashi, Y. Tanaka and I. Nishiyama, Proc. SPIE 5567 (2004) 1435.
- (2004) Proc. SPIE , vol.5567 , pp. 1435
- Abe, T.¹ Nishiguchi, M.² Amano, T.³ Motonaga, T.⁴ Sasaki, S.⁵ Mohri, H.⁶ Hayashi, N.⁷ Tanaka, Y.⁸ Nishiyama, I.⁹

29
- 0036643635
- I. Raptis and C.D. Diakoumakos, Microelectron. Eng. 61-62 (2002) 829.
- (2002) Microelectron. Eng. , vol.61-62 , pp. 829
- Raptis, I.¹ Diakoumakos, C.D.²

30
- 0037159825
- C.D. Diakoumakos and I. Raptis, Polymer 44 (2003) 251.
- (2003) Polymer , vol.44 , pp. 251
- Diakoumakos, C.D.¹ Raptis, I.²

31
- 33745588981
- G. Reiter, Europhys. Lett. 23 (1993) 597.
- (1993) Europhys. Lett. , vol.23 , pp. 597
- Reiter, G.¹

32
- 0000802484
- J. A. Forrest, C. Svanberg, K. Révész, M. Rodahl, L. M. Torell and B. Kasemo, Phys Rev. E58 (1998) R1226.
- (1998) Phys Rev. , vol.E58
- Forrest, J.A.¹ Svanberg, C.² Révész, K.³ Rodahl, M.⁴ Torell, L.M.⁵ Kasemo, B.⁶

33
- 0028751869
- T. Kajiyama, K. Tanaka, I. Ohki, S.-R. Ge, J.-S. Yoon and A. Takahara, Macromolecules 27 (1994) 7932.
- (1994) Macromolecules , vol.27 , pp. 7932
- Kajiyama, T.¹ Tanaka, K.² Ohki, I.³ Ge, S.-R.⁴ Yoon, J.-S.⁵ Takahara, A.⁶

34
- 0030818970
- T. Kajiyama, K. Tanaka and A. Takahara, Macromolecules 30 (1997) 280.
- (1997) Macromolecules , vol.30 , pp. 280
- Kajiyama, T.¹ Tanaka, K.² Takahara, A.³

35
- 0032165711
- T. Kajiyama, K. Tanaka and A. Takahara, Polymer 39 (1998) 4665.
- (1998) Polymer , vol.39 , pp. 4665
- Kajiyama, T.¹ Tanaka, K.² Takahara, A.³

36
- 0035808085
- N. Satomi, K. Tanaka, A. Takahara, T. Kajiyama, T. Ishizone and S. Nakahama, Macromolecules 34 (2001) 8761.
- (2001) Macromolecules , vol.34 , pp. 8761
- Satomi, N.¹ Tanaka, K.² Takahara, A.³ Kajiyama, T.⁴ Ishizone, T.⁵ Nakahama, S.⁶

37
- 0141608680
- A. Yamaguchi, R. Tsuchiya, H. Fukuda, O. Komuro, H. Kawada and T. Iizumi, Proc. SPIE 5038 (2003) 689.
- (2003) Proc. SPIE , vol.5038 , pp. 689
- Yamaguchi, A.¹ Tsuchiya, R.² Fukuda, H.³ Komuro, O.⁴ Kawada, H.⁵ Iizumi, T.⁶

38
- 0037830592
- A. Yamaguchi, H. Fukuda, H. Kawada and T. Iizumi, J. Photopolym .Sci. Technol. 16 (2003) 387.
- (2003) J. Photopolym.Sci. Technol. , vol.16 , pp. 387
- Yamaguchi, A.¹ Fukuda, H.² Kawada, H.³ Iizumi, T.⁴

39
- 0041361764
- A. Yamaguchi and O. Komuro, Jpn. J. Appl. Phys. 42 (2003) 3763
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 3763
- Yamaguchi, A.¹ Komuro, O.²

40
- 29044434600
- A. Yamaguchi, H. Fukuda, T. Arai, J. Yamamoto, T. Hirayama, D. Shiono, H. Hada and J. Onodera, J. Vac. Sci. Technol. B23 (2005) 2711.
- (2005) J. Vac. Sci. Technol. , vol.B23 , pp. 2711
- Yamaguchi, A.¹ Fukuda, H.² Arai, T.³ Yamamoto, J.⁴ Hirayama, T.⁵ Shiono, D.⁶ Hada, H.⁷ Onodera, J.⁸

41
- 0038457081
- V. Constantoudis, G. P. Patsis, A. Tserepi and E. Gogolides, J. Vac. Sci. Technol. B21 (2003) 1019.
- (2003) J. Vac. Sci. Technol. , vol.B21 , pp. 1019
- Constantoudis, V.¹ Patsis, G.P.² Tserepi, A.³ Gogolides, E.⁴

42
- 4344716578
- V. Constantoudis, G. Patsis, L. Leunissen and E. Gogolides, Proc. SPIE 5375 (2004) 967.
- (2004) Proc. SPIE , vol.5375 , pp. 967
- Constantoudis, V.¹ Patsis, G.² Leunissen, L.³ Gogolides, E.⁴

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