Liquid-jet laser-plasma extreme ultraviolet sources: From droplets to filaments

Journal of Physics D: Applied Physics

Volumn 37, Issue 23, 2004, Pages 3233-3243

  Hansson, Björn A M ^a,b   Hertz, Hans M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b CYMER INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACIAL ENERGY; LITHOGRAPHY; OPTICAL COLLIMATORS; PLASMA DENSITY; PLASMA JETS; PLASMA SOURCES; SURFACE TENSION; THERMAL LOAD; ULTRAVIOLET RADIATION;

LIQUID-JET TARGETS; PLASMA INTERACTION; ULTRAVIOLET GENERATION; ULTRAVIOLET SOURCES;

LASER PRODUCED PLASMAS;

EID: 10644277296     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/23/004     Document Type: Article

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