Target analysis of laser-plasma droplet-target system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4144, Issue , 2000, Pages 38-42

  Hemberg, O ^a   Hansson, B A M ^a   Hertz, H M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC LIQUIDS; HYDRODYNAMICS; JETS; PRESSURE EFFECTS; SURFACE TENSION; ULTRAVIOLET RADIATION; X RAY LITHOGRAPHY; X RAY MICROSCOPES; X RAY PRODUCTION;

DROPLET-TARGET SYSTEMS; EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY;

LASER PRODUCED PLASMAS;

EID: 0034499787     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405904     Document Type: Conference Paper

References (16)