-
1
-
-
0003662962
-
-
Springer, Heidelberg, in press
-
X-Ray Microscopy and Spectromicroscopy, edited by J. Thieme, G. Schmahl, D. Rudolph, and E. Umbach (Springer, Heidelberg, in press).
-
X-Ray Microscopy and Spectromicroscopy
-
-
Thieme, J.1
Schmahl, G.2
Rudolph, D.3
Umbach, E.4
-
3
-
-
0010318625
-
-
Optical Society of America, Washington, DC
-
See, e.g., several papers in OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography, edited by G. D. Kubiak and D. R. Kania (Optical Society of America, Washington, DC, 1996).
-
(1996)
OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography
, vol.4
-
-
Kubiak, G.D.1
Kania, D.R.2
-
4
-
-
0027847391
-
-
M. Richardson W. T. Silfvast, H. A. Bender, A. Hanzo, V. P. Yanovsky, F. Jin, and J. Thorpe, Appl. Opt. 32, 6901 (1993).
-
(1993)
Appl. Opt.
, vol.32
, pp. 6901
-
-
Richardson, M.1
Silfvast, W.T.2
Bender, H.A.3
Hanzo, A.4
Yanovsky, V.P.5
Jin, F.6
Thorpe, J.7
-
8
-
-
0030400850
-
-
L. Malmqvist, L. Rymell, M. Berglund, and H. M. Hertz, Rev. Sci. Instrum. 67, 4150 (1996).
-
(1996)
Rev. Sci. Instrum.
, vol.67
, pp. 4150
-
-
Malmqvist, L.1
Rymell, L.2
Berglund, M.3
Hertz, H.M.4
-
9
-
-
85034487512
-
-
Aachen Germany (personal communication)
-
R. Lebert, Aachen Germany (personal communication).
-
R. Lebert
-
-
-
10
-
-
0000165289
-
-
edited by D. Attwood and F. Zernike Optical Society of America, Washington, DC
-
G. D. Kubiak, K. D. Krenz, K. W. Berger, T. G. Trucano, P. W. Fisher, and M. J. Gouge, in OSA Proceedings on Extreme Ultraviolet Lithography Vol. 23, edited by D. Attwood and F. Zernike (Optical Society of America, Washington, DC, 1995), p. 248.
-
(1995)
OSA Proceedings on Extreme Ultraviolet Lithography
, vol.23
, pp. 248
-
-
Kubiak, G.D.1
Krenz, K.D.2
Berger, K.W.3
Trucano, T.G.4
Fisher, P.W.5
Gouge, M.J.6
-
12
-
-
1542646838
-
-
R. H. Dixon, J. L. Ford, T. N. Lee, and R. C. Elton, Rev. Sci. Instrum. 56, 471 (1985).
-
(1985)
Rev. Sci. Instrum.
, vol.56
, pp. 471
-
-
Dixon, R.H.1
Ford, J.L.2
Lee, T.N.3
Elton, R.C.4
-
14
-
-
1542541934
-
-
Ph.D. thesis, Stanford University, Stanford, CA
-
J. A. Trail, Ph.D. thesis, Stanford University, Stanford, CA, 1989.
-
(1989)
-
-
Trail, J.A.1
-
17
-
-
0029488708
-
-
H. M. Hertz, L. Rymell, M. Berglund, and L. Malmqvist, Proc. SPIE 2523, 88 (1995).
-
(1995)
Proc. SPIE
, vol.2523
, pp. 88
-
-
Hertz, H.M.1
Rymell, L.2
Berglund, M.3
Malmqvist, L.4
-
19
-
-
85034484555
-
-
unpublished
-
T. Wilhein, D. Hambach, S. Rehbein, M. Berglund, L. Rymell, and H. M. Hertz (unpublished).
-
-
-
Wilhein, T.1
Hambach, D.2
Rehbein, S.3
Berglund, M.4
Rymell, L.5
Hertz, H.M.6
-
20
-
-
0031192537
-
-
T. Wilhein, D. Hambach, B. Niemann, M. Berglund, L. Rymell, and H. M. Hertz, Appl. Phys. Lett. 71, 190 (1997).
-
(1997)
Appl. Phys. Lett.
, vol.71
, pp. 190
-
-
Wilhein, T.1
Hambach, D.2
Niemann, B.3
Berglund, M.4
Rymell, L.5
Hertz, H.M.6
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