Liquid-tin-jet laser-plasma extreme ultraviolet generation

Applied Physics Letters

Volumn 84, Issue 13, 2004, Pages 2256-2258

  Jansson, P A C ^a   Hansson, B A M ^a   Hemberg, O ^a   Otendal, M ^a   Holmberg, A ^a   De Groot, J ^a   Hertz, H M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CHARGE COUPLED DEVICES; ELECTRON BEAMS; ELECTRON TRANSITIONS; JETS; LIGHT EMISSION; LIGHT REFLECTION; LIQUID METALS; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; TIN; ULTRAVIOLET RADIATION; X RAYS;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; HIGH-REPETITION-RATE LASERS; LIQUID-METAL JETS; PARTICULATE DEBRIS EMISSION;

LASER PRODUCED PLASMAS;

EID: 2142714542     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1690874     Document Type: Article

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