X-ray and EUV laser-plasma sources based on cryogenic liquid-jet target

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue I, 1999, Pages 421-424

  Rymell, L ^a   Berglund, M ^a   Hansson, B A M ^a   Hertz, H M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

JETS; LASER PRODUCED PLASMAS; LIQUEFIED GASES; SPECTROSCOPIC ANALYSIS;

CRYOGENIC LIQUID-JET TARGETS; EXTREME ULTRAVIOLET (EUV) RADIATIONS;

X RAY LITHOGRAPHY;

EID: 0032671536     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351114     Document Type: Conference Paper

References (12)