Mass-limited, debris-free laser-plasma EUV source

Optics Communications

Volumn 145, Issue 1-6, 1998, Pages 109-112

  Richardson, Martin ^a   Torres, David ^a   DePriest, Chris ^a   Jin, Feng ^a   Shimkaveg, Gregory ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMISSION; LITHOGRAPHY; NEODYMIUM LASERS;

LASER PLASMA SOURCES;

LASER PRODUCED PLASMAS;

EID: 0030622732     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(97)00421-5     Document Type: Article

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