Silicon nitride microclips for the kinematic location of optic fibres in silicon V-shaped grooves

Journal of Micromechanics and Microengineering

Volumn 8, Issue 4, 1998, Pages 343-360

  Bostock, R M ^a   Collier, J D ^b   Jansen, R J E ^b   Jones, R ^b   Moore, D F ^a   Townsend, J E ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Cambridge Consultants Limited   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ETCHING; LIGHT MEASUREMENT; LITHOGRAPHY; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; SEMICONDUCTOR LASERS; SILICON NITRIDE; SINGLE MODE FIBERS; SUBSTRATES; SURFACE MOUNT TECHNOLOGY;

CLIP TECHNOLOGY; SILICON NITRIDE MICROCLIPS;

OPTICAL FIBER FABRICATION;

EID: 0032296671     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/4/014     Document Type: Article

References (44)

1. Deimel P P 1991 Micromachining processes and structures in micro-optics and optoelectronics J. Micromech. Microeng, 1 199-222
2. Armiento C A, Tabasky M, Jagannath C, Fitzgerald T W, Shieh C L, Barry V, Rothman M, Negri A, Haugsjaa P O and Lockwood HF 1991 Passive coupling of InGaAsP/InP laser array and single mode fibres using a silicon waferboard Electron. Lett. 27 1109-11
3. Rogner A, Ehrfeld W, Munchmeyer D, Bleg P, Burbaum C and Mohr J 1991 LIGA based flexible microstructures for fibre chip coupling J. Micromech. Microeng, 1 167
4. Rogner A, Eicher J, Munchmeyer D, Peters R-P and Mohr J 1992 The LIGA technique - what are the new opportunities J. Micromech. Microeng. 2 133-40
5. Gerner M, Paatzsch T, Weber L, Schifl H, Smaglinski I, Bauer H-D, Abraham M and Ehrfeld W 1995 Micro-optical components for fibre and integrated optics realised by the LIGA technique IEEE J. Micro Electro Mech. Syst. 4 328-33
6. Elderstig H, Vieider C and Lindstrom B 1995 A mechanical splice for fibre ribbons Digest 8th Int. Conf. on Solid-State Sensors Actuators (Stockholm, 1995) pp 359-60
7. Collins J V, Lealman I F, Fiddyment P J, Jones C A, Waller R G, Rivers L J, Cooper K, Perrin S D, Field M W and Harlow M J 1995 Passive alignment of a tapered laser with more than 50% coupling efficiency Electron. Lett. 31 730-1
8. Alavi M, Buttgenbach S, Schumacher A and Wagner H-J 1991 Laser machining of silicon for the fabrication of new microstructures Digest 6th Int. Conf. on Solid-State Sensors Actuators (San Francisco, CA, 1991) pp 512-5
9. Mickelson A R, Basanvanhally N R and Lee Y-C 1997 Optoelectronic Packaging (New York: Wiley-Interscience)
10. Wenger G, Stoll L, Weiss B, Schienle M, Muller-Nawrath R, Eichinger S, Müller J, Acklin B and Müller G 1994 Design and fabrication of monolithic optical spot size transformers for highly efficient fibre-chip coupling J. Lightwave Technol. 12 1782-90
11. van Roijen R, van der Hofstad G, Groten M, van der Heyden J, Thijs P and Verbeek B 1993 Fabrication of low loss integrated comer mirrors Appl. Opt. 32 3246-8
12. Bailey S and Jones C 1994 Recent advances in fibre to fibre and fibre to waveguide interconnect technology Int. J. Optoelectron. 9 171
13. Coulter M 1995 Fibres are guided into the groove Electron. Times 1 June 12
14. Dettmer R 1996 Only connect IEE Rev. September 186
15. Bostock R M, Townsend J E, Jones R, Jansen R-J E and Moore D F 1997 Low cost integrated photonic systems LEOS '97 IEEE Lasers and Electro-Optics Society vol 2, pp 274-6
16. Bostock R M, Townsend J E, Jones R, Jansen R-J E and Moore D F Patent Application PCT/GB96/00176
17. Strandman C and Bäcklund Y 1995 Fabrication of bulk silicon holding structures for mounting of optical fibre in V-grooves Proc. SPIE 2639 18-24
18. Bäcklund Y 1997 Micromechanics in optical microsystems - with focus on telecom systems J. Micromech. Microeng, 7 93-8
19. Strandman C and Bäcklund Y 1997 Bulk silicon holding structures for mounting optical fibres in V grooves IEEE J. Micro Electro Mech. Syst. 6 35
20. Strandman C and Bäcklund Y 1998 Passive and fixed alignment of devices using flexible silicon elements formed by selective etching J. Micromech. Microeng. 8 39-14
21. Hogari K, Furukawa S and Tsuchide K 1997 Field-installable single fibre connector Electron. Lett. 33 1072-3
22. Usui M and Sato N 1997 700 Mb/s × 40 channel VCSEL arrays and bare fiber connectors LEOS'97, IEEE Lasers and Electro-Optics Society vol 1, p 51
23. Petersen K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
24. Madou M J 1997 Fundamentals of Microfabrication (Boca Raton, FL: Chemical Rubber Company)
25. Frühauf J, Trautmann K, Wittig J and Zielke D 1993 A simulation tool for orientation dependent etching J. Micromech. Microeng. 3 113-5
26. Sato K, Shikida M, Matsushima Y, Yamashiro T, Asaumi K, Iriye Y and Yamamoto M 1998 Characterization of orientation dependent etching properties of single-crystal silicon: effects of KOH concentration Sensors Actuators A 64 87-93
27. Kovacs G T A, Maluf N I and Petersen K E 1998 Bulk micromachining of silicon Proc. IEEE 86 1536
28. Schroder H, Obermeier E and Steckenborn A 1998 Effects of the etch mask on the anisotropy ratio of (100) silicon in aqueous KOH J. Micromech. Microeng. 8 99-103
29. Ticknor A, Lipscomb G and Lytel R Practical considerations for polymer photonic devices Proc. SPIE 2285 386-91
30. Wiesmann R, Kalveram S, Rudolph S, Jöhnck M and Neyer A 1996 Single-mode polymer waveguides for optical backplanes Electron. Lett. 32 2329-30
31. Bestwick T 1997 Integrated optics: molding photonics components into solutions Photon. Spectra February 132-4
32. Bruno A, Mersali B and Menigaux L 1997 Multi pigtailing using V grooves and mechanical cleaving on the same InP substrate Electron. Lett. 33 1075-7
33. Vusirikala V, Saini S, Bartolo R, Whaley R, Agrawala A, Dagenais M, Johnson F and Stone D 1997 High-butt-coupling efficiency to fibers using a InGaAsP laser integrated with a tapered ridge mode transformer LEOS'97, IEEE Lasers and Electro-Optics Society vol 2, pp 130-1
34. Snyder A W and Love J D 1983 Optical Waveguide Theory (London: Chapman and Hall)
35. Bazylenko M V, Gross M, Simonian A and Chu P L 1996 Pure and fluorine-doped silica films deposited in a hollow cathode reactor for integrated optic applications J. Vac. Sci. Technol. A 14 336-45
36. Chu T, Lee C and Gruber G The preparation and properties of amorphous silicon nitride films J. Electrochem. Soc. 114 717-22
37. Lanford W and Rand M 1978 The hydrogen content of plasma-deposited silicon nitride J. Appl. Phys. 49 2473-7
38. Lutwyche M I and Moore D F 1991 Suspended structures made by electron beam lithography J. Micromech. Microeng, 1 237
39. Jansen H, de Boer M, Legtenberg R and Elwenspoek M 1995 The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control J. Micromech. Microeng. 5 115-20
40. Daniel J H, Moore D F, Walker J F and Whitney J T 1997 Focused ion beams in microsystem fabrication Microelectron. Eng. 35 431-4
41. Hecht E and Zajac A 1997 Optics 3rd edn (Reading, MA: Addison-Wesley)
42. Atherton P, Reay N and Ring J 1981 Tunable Fabry Pérot filters Opt. Eng. 20 806-14
43. Jones R 1992 Optical micron to nanometric surface finish and form measurement Proc. Micro System Tech. '92 pp 147-56
44. Young W C 1989 Roark's Formulas for Stress and Strain 6th edn (New York: McGraw-Hill)