Bulk silicon holding structures for mounting of optical fibers in v-grooves

Journal of Microelectromechanical Systems

Volumn 6, Issue 1, 1997, Pages 35-40

  Strandman, Carola ^a   Bäcklund, Ylva ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Fiber holding; Micromaehing; PHET; Selective etching; Silicon; v grooves

Indexed keywords

ELECTROCHEMISTRY; ETCHING; MICROMACHINING; OPTICAL FIBERS; PASSIVATION; SEMICONDUCTING SILICON; SEMICONDUCTOR JUNCTIONS;

CANTILEVER BEAMS; MICROMACHINED STRUCTURES; PHOTOVOLTAIC ELECTROCHEMICAL ETCH STOP TECHNIQUE; SILICON HOLDING STRUCTURES; V GROOVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031095436     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.557528     Document Type: Article

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