Refractive collimating microlens arrays by surface tension self-assembly

IEEE Photonics Technology Letters

Volumn 12, Issue 11, 2000, Pages 1507-1509

  Syms, Richard R A ^a,b  

^a IEEE   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROOPTOELECTROMECHANICAL SYSTEMS; REFRACTIVE COLLIMATING MICROLENS ARRAYS; SURFACE TENSION SELF ASSEMBLY;

MELTING; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES; SURFACE TENSION;

MICROLENSES;

EID: 0034314014     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.887719     Document Type: Article

References (6)

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3. C. R. King, L. Y. Lin, and M. C. Wu, "Out-of-plane refractive microlens fabricated by surface micromachining," IEEE Photon. Technol. Lett., vol. 8, pp. 1349-1351, Oct. 1996.
4. J. S. Legatt and M. C. Hutley, "Microlens arrays for interconnection of singlemode fiber arrays," Elect. Lett., vol. 27, pp. 238-240, 1991.
5. R. R. A. Syms and E. M. Yeatman, "Self-assembly of fully three-dimensional micro-structures using rotation by surface tension forces," Elect. Lett., vol. 29, pp. 662-664, 1993.
6. R. R. A. Syms, "Surface tension powered self-assembly of 3-D micro-optomechanical structures," IEEE/ASME J. Microelectromech. Syst., vol. 8, pp. 448-455, 1999.