Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4180, Issue , 2000, Pages 86-90

  Gasparyan, Arman ^a   Aksyuk, Vladimir ^a   Busch, Paul ^a   Arney, Susanne ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); LASER DOPPLER VELOCIMETERS; MICROMACHINING; MIRRORS; VIBRATIONS (MECHANICAL);

LASER DOPPLER VIBROMETERS; MICROMIRRORS; SURFACE-MICROMACHINED SELF-ASSEMBLING TILTING MIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034545710     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395696     Document Type: Conference Paper

References (4)