Megahertz opto-mechanical modulator

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 46-50

  Marxer, Cornel ^a   Grétillat, Marc Alexis ^a   Jaecklin, Victor P ^b   Baettig, Rainer ^c   Anthamatten, Olivier ^c   Vogel, Paul ^c   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b Oerlikon Assembly Equipment AG   (Switzerland)

^c Ascom Tech   (Switzerland)

Author keywords

Micromachining; Modulators; Opto mechanical systems

Indexed keywords

ELECTRODES; LIGHT REFLECTION; MICROMACHINING; OPTIMIZATION;

FABRY PEROT MODULATORS; OPTOMECHANICAL MODULATORS; POLYSILICON ELECTRODES; SURFACE MICROMACHINING;

LIGHT MODULATORS;

EID: 0030100699     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80124-5     Document Type: Article

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