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Volumn , Issue , 2000, Pages 129-138
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MEMS reliability in shock environments
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CLAMPING DEVICES;
ENGINES;
FAILURE ANALYSIS;
GEARS;
RELIABILITY;
SHOCK TESTING;
SPRINGS (COMPONENTS);
STICTION;
MICROENGINES;
MICROELECTROMECHANICAL DEVICES;
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EID: 0033743234
PISSN: 00999512
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (209)
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References (14)
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