Effect of frequency on the lifetime of a surface micromachined microengine driving a load

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1998, Pages 26-35

  Tanner, Danelle M ^a   Miller, William M ^a   Eaton, William P ^a   Irwin, Lloyd W ^a   Peterson, Ken A ^a   Dugger, Michael T ^a   Senft, Donna C ^a   Smith, Norman F ^a   Tangyunyong, Paiboon ^a   Miller, Samuel L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; FRACTURE; GEARS; MATHEMATICAL MODELS; WEAR OF MATERIALS;

MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031681013     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1998.670438     Document Type: Conference Paper

References (16)