Electrical characterization and modification of a MicroElectroMechanical System (MEMS) for extended mechanical reliability and fatigue testing

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 1265-1269

  Meunier, D ^a,b,c   Desplats, R ^a,b   Benbrik, J ^a,b   Perez, G ^a   Pellet, C ^b   Etseve D ^c   Benteo, B ^d  

^a CNES   (France)

^b UNIVERSITÉ BORDEAUX 1   (France)

^c LAAS CNRS   (France)

^d SOREP   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; ELECTRON BEAMS; FATIGUE TESTING; ION BEAMS; MICROELECTRONICS; RELIABILITY; REVERSE ENGINEERING;

ELECTRON BEAM TESTERS; FOCUSED ION BEAMS (FIB);

MICROELECTROMECHANICAL DEVICES;

EID: 0032083620     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00096-1     Document Type: Article

References (2)

1. « Monolithic accelerometer with signal conditionning ADXL50 » Analog Device Datasheet
2. S.J. Sherman, W.K. Tsang, T.A. Core, R.S. Payne, D.E. Quinn, K.H-L. Chau, J.A. Farash, S.K. Baum « A low cost monolithic accelerometer : product/technology update » IEEE proceedings 1992