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Volumn 85, Issue 1, 2000, Pages 84-89
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Versatile tool for characterizing long-term stability and reliability of micromechanical structures
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC RESONATORS;
AGING OF MATERIALS;
ATOMIC FORCE MICROSCOPY;
CANTILEVER BEAMS;
FREQUENCY STABILITY;
RELIABILITY;
MICROMECHANICAL STRUCTURES;
COMPOSITE MICROMECHANICS;
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EID: 0034246436
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(00)00331-9 Document Type: Article |
Times cited : (16)
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References (9)
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