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Volumn 85, Issue 1, 2000, Pages 84-89

Versatile tool for characterizing long-term stability and reliability of micromechanical structures

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; AGING OF MATERIALS; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; FREQUENCY STABILITY; RELIABILITY;

EID: 0034246436     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00331-9     Document Type: Article
Times cited : (16)

References (9)
  • 1
    • 0031060760 scopus 로고    scopus 로고
    • Optimalization of a low-stress silicon nitride process for surface-micromachining applications
    • French P.J., Sarro P.M., Mallee R. Optimalization of a low-stress silicon nitride process for surface-micromachining applications. Sens. Actuators, A. 58:1997;149-157.
    • (1997) Sens. Actuators, a , vol.58 , pp. 149-157
    • French, P.J.1    Sarro, P.M.2    Mallee, R.3
  • 3
    • 0027610335 scopus 로고
    • Micromechanical fatigue testing
    • June
    • Connally J., Brown S. Micromechanical fatigue testing. Exp. Mech. 1993;81-90. June.
    • (1993) Exp. Mech. , pp. 81-90
    • Connally, J.1    Brown, S.2
  • 4
    • 0026881944 scopus 로고
    • Ageing phenomena in heavily doped (p+) micromachined silicon cantilever beams
    • Tabib-Azar M., Wong K., Ko Wen Ageing phenomena in heavily doped (p+) micromachined silicon cantilever beams. Sens. Actuators, A. 33:1992;199-206.
    • (1992) Sens. Actuators, a , vol.33 , pp. 199-206
    • Tabib-Azar, M.1    Wong, K.2    Ko, W.3
  • 6
    • 0004901474 scopus 로고    scopus 로고
    • Practical considerations of the galvanic etch-stop for device applications
    • Ashruf C.M.A., French P.J., Sarro P.M. Practical considerations of the galvanic etch-stop for device applications. Transducers '99. 1:1999;560-563.
    • (1999) Transducers '99 , vol.1 , pp. 560-563
    • Ashruf, C.M.A.1    French, P.J.2    Sarro, P.M.3
  • 7
    • 0030234766 scopus 로고    scopus 로고
    • Determination of spring constants of probes for force microscopy/spectroscopy
    • Gibson C.T., Watson G.S., Myhra S. Determination of spring constants of probes for force microscopy/spectroscopy. Nanotechnology. 7:1996;259-262.
    • (1996) Nanotechnology , vol.7 , pp. 259-262
    • Gibson, C.T.1    Watson, G.S.2    Myhra, S.3
  • 8
    • 0001026801 scopus 로고    scopus 로고
    • A method for determining the spring constant of cantilevers for atomic force microscopy
    • Torii A., Sasaki M. A method for determining the spring constant of cantilevers for atomic force microscopy. Meas. Sci. Technol. 7:1996;179-184.
    • (1996) Meas. Sci. Technol. , vol.7 , pp. 179-184
    • Torii, A.1    Sasaki, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.