Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 97-102

  Nieva, Patricia ^a   Tada, Haruna ^a   Zavracky, Paul ^a   Adams', George ^a   Miaoulis, Loannis ^b   Wong, Peter ^a  

^a Northeastern University   (United States)

^b TUFTS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COEFFICIENT OF THERMAL EXPANSION (CTE); TEMPERATURE SENSORS;

MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; STATISTICAL METHODS; SUBSTRATES; THERMOANALYSIS; THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0033345618     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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