Dynamics of MEMS microengines using optoelectronic laser interferometry

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 163-168

  Brown, G C ^a   Pryputniewicz, R J ^a   De Boer, M P ^b   Smith, Norman ^b  

^a Worcester Polytechnic Institute   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; ELECTROSTATIC ACTUATORS; INTERFEROMETRY; KINEMATICS; LASER APPLICATIONS; MATHEMATICAL MODELS; MOTION CONTROL; OPTICAL MICROSCOPY; OPTIMIZATION; OPTOELECTRONIC DEVICES;

MICROENGINES; OPTOELECTRONIC LASER INTERFEROMETRY MICROSCOPE; ROTATING MICROGEARS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034499773     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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