Processes and materials for creating and maintaining reliable vacuum and other controlled atmospheres in hermetically sealed MEMs packages

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3880, Issue , 1999, Pages 75-82

  Kullberg, Richard C ^a  

^a SAES Getters USA Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGASSING; DEGRADATION; DESORPTION; ELECTRONICS PACKAGING; GETTERS; HERMETIC SEALS; PROCESS CONTROL; VACUUM APPLICATIONS;

GETTERING MATERIALS; VACUUM PACKAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033316454     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)