Materials reliability in MEMS devices

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 591-593

  Brown, Stuart B ^a   Van Arsdell, William ^a   Muhlstein, Christopher L ^a  

^a EXPONENT INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FATIGUE OF MATERIALS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON;

POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0030718291     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)