Five parametric resonances in a microelectromechanical system

Nature

Volumn 396, Issue 6707, 1998, Pages 149-152

  Turner, Kimberly L ^a   Miller, Scott A ^b,c   Hartwell, Peter G ^d   MacDonald, Noel C ^d   Strogatz, Steven H ^a   Adams, Scott G ^a,b  

^a Department of Population Medicine and Diagnostic Sciences   (United States)

^b Department of Materials Science and Engineering   (United States)

^c Kionix Inc   (United States)

^d Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; NATURAL FREQUENCIES; OSCILLATIONS; PARAMETRIC AMPLIFIERS; RESONANCE;

MATHIEU EQUATION; MICROELECTROMECHANICAL SYSTEM; PARAMETRIC RESONANCES;

MICROELECTROMECHANICAL DEVICES;

ARTICLE; ATOMIC FORCE MICROSCOPY; DEVICE; EXCITATION CONTRACTION COUPLING; MATHEMATICAL ANALYSIS; MOLECULAR DYNAMICS; PREDICTION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SIGNAL TRANSDUCTION;

EID: 0032511981     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/24122     Document Type: Article

References (16)

1. Grimshaw, R. Nonlinear Ordinary Differential Equations 62-79 (Blackwell, Oxford, 1990).
2. Burns, J. A. More on pumping a swing. Am. J. Phys. 38, 920-922 (1970).
3. Ruby, L. Applications of the Mathieu equation. Am. J. Phys. 64, 39-44 (1996).
4. Nayfeh, A. H. & Mook, D. T. Nonlinear Oscillations (Wiley, New York, 1979).
5. Faraday, M. On the forms and states assumed by fluids in contact with vibrating elastic surfaces. Phil. Trans. R. Soc. Lond. 121, 319-340 (1831).
6. Rayleigh, Lord The Theory of Sound Vol. II 346-350 (Dover, New York, 1944).
7. Tan, J. & Gabrielse, G. Synchronization of parametrically pumped electron oscillators with phase bistability. Phys. Rev. Lett. 67, 3090-3093 (1991).
8. Howson, D. P. & Smith, R. B. Parametric Amplifiers (McGraw-Hill, New York, 1970).
9. Likharev, K. K. Dynamics of Josephson Junctions and Circuits (Gordon & Breach Science, Philadelphia, 1986).
10. Levy, D. M. & Keller, J. B. Instability intervals of Hill's equation. Commun. Pure Appl. Math. 16, 458-476 (1963).
11. Saif, M. T. A. & MacDonald, N. C. Measurement of forces and spring constants of microinstruments. Rev. Sci. Instrum. 69, 1410-1422 (1998).
12. Miller, S. A., Turner, K. L. & MacDonald, N. C. Microelectromechanical scanning probe instruments for array architectures. Rev. Sci. Instrum. 68, 4155-4162 (1997).
13. Timp, G. (ed.) Nano-Science and Technology (AIP, Woodbury, in the press).
14. Carr, W. N. (ed.) J. Micromech. Microeng. 4, (4: special issue on microfluids) (1994).
15. Tang, W. C., Lim, M. G. & Howe, R. T. Electrostatic comb drive levitation and control method. J. MicroElectroMechan. Syst. 1, 170-178 (1992).
16. COULOMB (Integrated Engineering Software, Inc., 1989).