Reliability issues of COTS MEMS for aerospace applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3880, Issue , 1999, Pages 83-88

  Ramesham, Rajeshuni ^a   Ghaffarian, Reza ^a   Kim, Namsoo P ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; AEROSPACE APPLICATIONS; ELECTRONICS PACKAGING; MICROMACHINING; PARTIAL PRESSURE SENSORS; RELIABILITY;

COMMERCIAL OFF THE SHELF; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033344366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (34)