Built-in strain in polysilicon: measurement and application to sensor fabrication

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 3-12

  Guckel, H ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; MICROMACHINING; MORPHOLOGY; NATURAL FREQUENCIES; POLYSILICON; SENSORS; STRAIN; VACUUM;

BUILT-IN STRAIN; EULER BUCKLING; POLYSILICON FILMS; SINGLE PHOTOMASK LEVEL; SURFACE MICROMACHINING;

SEMICONDUCTING FILMS;

EID: 0034505203     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. D.W. Burns, Micromechanics of Integrated Sensors and the Planar Processed Pressure Transducer, PhD thesis, University of Wisconsin - Madison, 1999.
2. R.T. Howe and R.S. Muller, "Integrated Resonant-Microbridge Vapor Sensor," IEDM 1984, pp.213-216, 1984.
3. E. Obermeier, P. Kopystynski, R. Niebl, "Characteristics of Polysilicon Layers and Their Application in Sensors," 1986 IEEE Solid State Sensor Workshop, Hilton Head Island, SC, June, 1986.
4. H. Guckel, D.W. Burns, C.R. Rutigliano, D.K. Showers, J. Uglow, "Fine Grained Polysilicon and its Application to Planar Pressure Transducers," Transducers '87, pp. 277-282, 1987.
5. H. Guckel, T. Randazzo, D.W. Burns, "A Simple Technique for the Determination of Mechanical Strain in Thin Films with Applications to Polysilicon," J. Appl. Physics, Vol. 57, No. 5, pp. 1671-1675, March 1985.
6. H. Guckel, D.W. Burns, C. Visser, C. Rutigliano, D. DeRoo, T. Christenson, P. Klomberg, H. Tilmans, "Processing Conditions for Polysilicon Films with Tensile Strain for Large Aspect Ratio Microstructures," Solid State Sensors and Actuator Workshop, Hilton Head Island, SC, June 1988.
7. Y. Ahn, Resonant Microbeam Electronic Oscillators for Strain Sensing, PhD thesis, University of Wisconsin - Madison, 1999.
8. J.J. Sniegowski, "Design and Fabrication of Polysilicon Resonating Beam Force Transducers," PhD Thesis, University of Wisconsin - Madison, 1991.
9. H. Guckel, D. Burns, C. Rutigliano, "Design and Construction Techniques for Planar Polysilicon Pressure Transducers with Piezoresistive Read-Out," 1986 Solid State Sensor Workshop, Hilton Head Island, SC, June 1986.
10. J.D. Zook, D.W. Burns, W.R. Herb, H. Guckel, J.W. Kang, Y. Ahn, "Optically Excited Self-Resonant Strain Transducers," Digest of Technical Papers, Vol. 2, Transducers '95, Stockholm, Sweden, pp.600-603, June 1995.