Development of characterization tools for reliability testing of MicroElectroMechanical system actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3880, Issue , 1999, Pages 156-164

  Smith, Norman F ^a   Eaton, William P ^a   Tanner, Danelle M ^a   Allen, James J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; MECHANICAL TESTING; MICROACTUATORS; MICROMACHINING; MICROSENSORS; RELIABILITY;

COMB DRIVE ACTUATOR; PARAMETER EXTRACTION; RESTORING SPRINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033338499     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)