Performance and reliability of a new MEMS electrostatic lateral output motor

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1999, Pages 179-188

  Patton, S T ^a   Cowan, W D ^a   Zabinski, J S ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; COLD WELDING; DURABILITY; ELECTRIC CONTACTS; ELECTROSTATIC DEVICES; PASSIVATION; PERFORMANCE; RELIABILITY; SURFACE CHEMISTRY; TRIBOLOGY; WEAR OF MATERIALS;

ELECTROSTATIC FORCES; LATERAL OUTPUT MOTOR; SLIDING CONTACTS; STATIC CONTACTS; SURFACE PASSIVATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032659630     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)