Nontactile reliability testing of a micro optical attenuator

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2000, Pages 123-128

  Rembe, Christian ^c   Aschemann, Harald ^a   Aus Der Wiesche, Stefan ^a   Hofer, Eberhard P ^a   Debeda, Helen ^b   Juergen, M ^b   Wallrabe, Ulrike ^b  

^a UNIVERSITY OF ULM   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH SPEED PHOTOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MOTION PICTURES; OPTICAL SWITCHES;

MICROOPTICAL ATTENUATORS;

ELECTRIC ATTENUATORS;

EID: 0033748594     PISSN: 00999512     EISSN: None     Source Type: Journal    
DOI: 10.1109/RELPHY.2000.843902     Document Type: Article

References (13)

1. H. Debeda Development of miniaturized piezoelectric actuators for optical applications using LIGA technology Journal of Microelectromechanical Systems 8 258 1999
2. H. Debeda Fully batch fabricated LIGA actuators integrated on piezoelectric ceramic substrates Proc. of ACTUATOR 98 Proc. of ACTUATOR 98 Bremen Germany
3. L. Segel Mathematics applied to continuum mechanics 1983 Dover New York
4. A. Gutlederer Modellbasierte Simulation, Vermessung und Finite-Elemente-Analyse eines Mikrochoppers 1997 University of Ulm
5. P. Egelhaaf Mikrosystemtechnik: Von der Forschung zu innovativen Produkten Physikalische Blaetter 52 318 1999
6. P. Krehl High-speed visualization-a useful diagnostic tool for the development and testing of microactuators-retrospect and prospect Microsystem Technologies 5 113 1999
7. C. Davis Using a light microscope with nanometer accuracy Opt. Eng. 37 1299 1998
8. D. Freeman Multidimensional motion analysis of MEMS using computer microvision Solid-State Sensor and Actuator Workshop 150 Solid-State Sensor and Actuator Workshop Hilton Head Island South Carolina 1998-June-8-11
9. M. Hart Time-resolved measurement of optical MEMS using stroboscopic interferometry Transducers 99 1 470 1999
10. R. Gutierrez Pulsed-Source interferometry for characterization of resonant micromachined structures Solid-State Sensor and Actuator Workshop 324 Solid-State Sensor and Actuator Workshop Hilton Head Island South Carolina 1998-June-8-11
11. C. Rembe Investigations of nonreproducible phenomena in thermal ink jets with real high speed cine photomicrography J. of Imag. Science & Techn. 43 325 1999
12. J. Honour Electronic camera system take the measure of high-speed events Laser Focus World 30 121 1994
13. P. Krehl Versatile microscope-coupled high intensity pulsed light source for high-speed cine photomicrography of microactuators Proc. SPIE 2869 472 Proc. SPIE 1996