Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope

Nanotechnology

Volumn 25, Issue 40, 2014, Pages

  Wang, Fei ^a   Clément, Nicolas ^a   Ducatteau, Damien ^a   Troadec, David ^a   Tanbakuchi, Hassan ^b   Legrand, Bernard ^a,c   Dambrine, Gilles ^a   Théron, Didier ^a  

^a UNIV LILLE   (France)

^b AGILENT TECHNOLOGIES   (United States)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

calibrated aF measurements; iSMM; microwave microscopy; nanocapacitors; nanocrystals; nanoparticles; water meniscus

Indexed keywords

NANOPARTICLES;

IMPEDANCE CHARACTERIZATION; INTERFEROMETRIC SCANNING; ISMM; MICROWAVE MICROSCOPY; NANOCAPACITORS; WATER MENISCUS;

NANOCRYSTALS;

EID: 84907217273     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/40/405703     Document Type: Article

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