Nanometer-scale material contrast imaging with a near-field microwave microscope

Applied Physics Letters

Volumn 90, Issue 14, 2007, Pages

  Imtiaz, Atif ^a   Anlage, Steven M ^a   Barry, John D ^b   Melngailis, John ^b  

^a University of Maryland   (United States)

^b University of Maryland   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY SHIFT SIGNALS; IMAGING CONTRAST; MICROWAVE MICROSCOPES; SPATIAL RESOLUTION;

BORON; DOPING (ADDITIVES); FIELD EMISSION MICROSCOPES; FREQUENCY SHIFT KEYING; SHEET RESISTANCE; SILICON WAFERS; TOPOGRAPHY;

NANOSTRUCTURED MATERIALS;

EID: 34047264134     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2719164     Document Type: Article

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