SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 84, Issue 12, 2013, Pages

An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

(8) Dargent, T a Haddadi, K a Lasri, T a Clement N a Ducatteau, D a Legrand, B a Tanbakuchi, H b Theron, D a

a INSTITUT D ELECTRONIQUE (France)

b AGILENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION METHOD; ERROR MODEL; INTERFEROMETRIC SCANNING; MEASUREMENTS OF; SCANNING MICROWAVE MICROSCOPIES; TEST FREQUENCIES; VECTOR NETWORK ANALYZERS;

EQUIPMENT; INSTRUMENTS;

CALIBRATION;

EID: 84891667774 PISSN: 00346748 EISSN: 10897623 Source Type: Journal
DOI: 10.1063/1.4848995 Document Type: Conference Paper

Times cited : (63)

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