Comparison of Al-Si-N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

Surface and Coatings Technology

Volumn 232, Issue , 2013, Pages 680-689

  Lewin, Erik ^a   Loch, Daniel ^b   Montagne, Alex ^c   Ehiasarian, Arutiun P ^b   Patscheider, Jörg ^a  

^a Laboratory for Nanoscale Materials Science   (Switzerland)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^c SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Coatings; HIPIMS; Mechanical properties; Nanocomposites; Optical properties; Plasma characterisation

Indexed keywords

COMPARATIVE STUDIES; DC MAGNETRON SPUTTERING; ENERGY-RESOLVED MASS SPECTROMETRY; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIPIMS; NANO-COMPOSITE COATING; OPTICAL EMISSION SPECTROSCOPIES (OES); SOLID SOLUTION PHASE;

ALUMINUM; COATINGS; EMISSION SPECTROSCOPY; EXPERIMENTS; HARD COATINGS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; MECHANICAL PROPERTIES; NANOCOMPOSITES; OPTICAL PROPERTIES; PHOTOELECTRONS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON NITRIDE; ULTRAVIOLET VISIBLE SPECTROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM COATINGS;

EID: 84883466234     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.06.076     Document Type: Article

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