Fully dense, non-faceted 111-textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias

Thin Solid Films

Volumn 518, Issue 21, 2010, Pages 5978-5980

  Lattemann, M ^a,b,c   Helmersson, U ^c   Greene, J E ^d  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c LINKÖPING UNIVERSITY   (Sweden)

^d University of Illinois at Urbana Champaign   (United States)

Author keywords

High power impulse magnetron sputtering (HiPIMS); High power pulsed magnetron sputtering (HPPMS); Ion assisted deposition; Nucleation and growth; Pulsed magnetron sputtering; Thin films; Titanium nitride; Transmission electron microscopy

Indexed keywords

AMORPHOUS FILMS; DEPOSITION RATES; GRAIN GROWTH; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAM ASSISTED DEPOSITION; METALLIC FILMS; PROBABILITY DISTRIBUTIONS; SILICA; THIN FILMS; TIN; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIGH POWER PULSED MAGNETRON SPUTTERING (HPPMS); ION ASSISTED DEPOSITION; NUCLEATION AND GROWTH; PULSED MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

EID: 77955550328     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.05.064     Document Type: Letter

References (34)

1. J.-E. Sundgren Thin Solid Films 128 1985 21
2. H. Ljungcrantz, M. Oden, L. Hultman, J.E. Greene, and J.-E. Sundgren J. Appl. Phys. 80 1996 6725
3. H. Rebenne, and D. Bhat Surf. Coat. Technol. 63 1994 1
4. W. Chou, G. Yu, and J. Huang Surf. Coat. Technol. 149 2002 7
5. G. Gagnon, J. Currie, J. Brebner, and T. Darwall J. Appl. Phys. 79 1996 7612
6. P. Patsalas, C. Charitidis, S. Logothetidis, C. Dimitriadis, and O. Valassiades J. Appl. Phys. 86 1999 5296
7. G. Chen, J. Guo, C. Lin, G. Hsu, L. Yang, and J. Fang J. Vac. Sci. Technol. A 20 2002 479
8. R. Hübler Surf. Coat. Technol. 116-119 1999 1111
9. L. Cyster, D. Grant, K. Parker, and T. Parker Biomol. Eng. 19 2002 171
10. S. Mukherjee, F. Maitz, M. Pham, E. Richter, F. Prokert, and W. Moeller Surf. Coat. Technol. 196 2005 312
11. L.E. Toth Transition Metal Carbides and Nitrides 1971 Academic Press New York
12. D. Gall, S. Kodambaka, I. Petrov, and J.E. Greene J. Appl. Phys. 93 2003 9086
13. L. Hultman, W.-D. Munz, J. Musil, S. Kadlec, I. Petrov, and J.E. Greene J. Vac. Sci. Technol. A 9 1991 434
14. L. Hultman, J.-E. Sundgren, J.E. Greene, D. Bergstrom, and I. Petrov J. Appl. Phys. 78 1995 5395
15. F.H. Baumann, D.L. Chopp, G.H. Gilmer, J.E. Greene, H. Huang, S. Kodambaka, I. Petrov, P. O'Sullivan, and T. Diaz de la Rubia MRS Bull. 26 2001 182
16. G. Hakansson, J.-E. Sundgren, D. McIntryre, J.E. Greene, and D.-W. Munz Thin Solid Films 153 1987 55
17. I. Petrov, L. Hultman, U. Helmersson, J.-E. Sundgren, and J.E. Greene Thin Solid Films 169 1989 299
18. I. Petrov, P.B. Barna, L. Hultman, and J.E. Greene J. Vac. Sci. Technol. A 21 2003 S117
19. I. Petrov, F. Adibi, J.E. Greene, W.D. Sproul, and W.-D. Munz J. Vac. Sci. Technol. A 10 1992 3283
20. I. Petrov, A. Myers, J.E. Greene, and J.R. Abelson J. Vac. Sci. Technol. A 12 1994 2846
21. J.E. Greene, J.-E. Sundgren, L. Hultman, I. Petrov, and D.B. Bergstrom Appl. Phys. Lett. 67 1995 2928
22. J.-S. Chun, I. Petrov, and J.E. Greene J. Appl. Phys. 86 1999 3633
23. J. Bohlmark, A. Ehiasarian, C. Christou, J. Alami, and U. Helmersson J. Vac. Sci. Technol. A 23 2005 18
24. V. Kouznetsov, K. Macak, J. Schneider, U. Helmersson, and I. Petrov Surf. Coat. Technol. 122 1999 290
25. U. Helmersson, M. Lattemann, J. Bohlmark, A. Ehiasarian, and J. Gudmundsson Thin Solid Films 513 2006 1
26. M. Hala, N. Viau, O. Zabeida, J.E. Klemberg-Sapieha, and L. Martinu J. Appl. Phys. 107 2010 043305
27. J. Bohlmark, M. Lattemann, J. Gudmundsson, A. Ehiasarian, Y. Aranda Gonzalvoand, N. Brenning, and U. Helmersson Thin Solid Films 515 2006 1522
28. http://www.spss.com.
29. M.A. Wall, D.G. Cahill, I. Petrov, D. Gall, and J.E. Greene Surf. Sci. 581 2005 L122
30. D.W. Hoffman J. Vac. Sci. Technol. A 3 1985 561
31. S.M. Rossnagel J. Vac. Sci. Technol. A 6 1988 19
32. J.M. Warrender, and M.J. Aziz Phys. Rev. B 76 2007 045414 refs therein
33. K.-H. Müller Phys. Rev. B 35 1987 7906
34. K.-H. Muller Surf. Sci. 184 1987 L375