Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films

Journal of Applied Physics

Volumn 109, Issue 10, 2011, Pages

  Ehiasarian, A P ^a   Vetushka, A ^a   Gonzalvo, Y Aranda ^b   Sfrn, G ^c   Szekely L ^c   Barna, P B ^c  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^b HIDEN ANALYTICAL LTD   (United Kingdom)

^c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC NITROGEN; AVERAGE POWER; COLUMN BOUNDARIES; DENSE STRUCTURES; DEPOSITION FLUXES; FILM TEXTURES; FILM-FORMING SPECIES; HIGH QUALITY; HIGH-CONTENT; HIGH-POWER; ION FLUXES; LANGMUIR PROBE MEASUREMENTS; MAGNETRON SPUTTERING PLASMA; NITRIDE FILMS; NITROGEN DISSOCIATION; PEAK CURRENTS; PEAK DISCHARGE; SPECTROMETRY MEASUREMENTS; TIN FILMS; TIN THIN FILMS;

DEPOSITION; DISSOCIATION; ELECTRIC DISCHARGES; IONIZATION; MASS SPECTROMETRY; METALLIC FILMS; NITROGEN; PLASMA DENSITY; PLASMA JETS; TEXTURES; THIN FILMS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION; X RAY DIFFRACTION;

PLASMA DEPOSITION;

EID: 79958845429     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3579443     Document Type: Conference Paper

References (47)

1. I. Petrov, L. Hultman, U. Helmersson, J.-E. Sundgren and J. E. Greene, Thin Solid Films 169, 299 (1989). 10.1016/0040-6090(89)90713-X
2. I. Petrov, A. Myers, J. E. Greene and J. R. Abelson, J. Vac. Sci. Technol. A 12, 2846 (1994). 10.1116/1.578955 (Pubitemid 24823854)
3. J. W. Gerlach, T. Hoche, L. Neumann and B. Rauschenbach, in 9th IEEE Conference on Nanotechnology (IEEE NANO 2009), Genoa, Italy, 2009 (unpublished).
4. H. Ljungcrantz, L. Hultman, J.-E. Sundgren and L. Karlsson, J. Appl. Phys. 78, 832 (1995). 10.1063/1.360272
5. R. L. Boxman, D. M. Sanders and P. J. Martin Handbook of Vacuum Arc Science Technology: Fundamentals and Applications (Noyes Publications, Park Ridge, 1995).
6. P. J. Martin, A. Bendavid and H. Takikawa, J. Vac. Sci. Technol. A 17, 2351 (1999). 10.1116/1.581772
7. R. N. Tarrant, M. M. M. Bilek, T. W. H. Oates, J. Pigott and D. R. McKenzie, Surf. Coat. Technol. 156, 110 (2002). 10.1016/S0257-8972(02)00073-7 (Pubitemid 34789066)
8. V. Kouznetsov, K. Macak, J. M. Schneider, U. Helmersson and I. Petrov, Surf. Coat. Technol. 122, 290 (1999). 10.1016/S0257-8972(99)00292-3
9. A. P. Ehiasarian, W. D. Munz, L. Hultman, U. Helmersson and I. Petrov, Surf. Coat. Technol. 163, 267 (2003). 10.1016/S0257-8972(02)00479-6 (Pubitemid 36122284)
10. A. P. Ehiasarian, Y. A. Gonzalvo and T. D. Whitmore, Plasma Processes and Polym. 4, S309 (2007). 10.1002/ppap.v4:3+
11. J. Alami, K. Sarakinos, F. Uslu and M. Wuttig, J. Phys. D: Appl. Phys. 42, 015304-015301-015307 (2009). 10.1088/0022-3727/42/1/015304
12. J. L. Labar, Ultramicroscopy 103, 237 (2005). 10.1016/j.ultramic.2004.12. 004 (Pubitemid 40585832)
13. J. L. Lbr, Microsc. Microanal. 14, 287 (2008).
14. A. Barna, B. Pecz and M. Menyhard, Ultramicroscopy 70, 161 (1998). 10.1016/S0304-3991(97)00120-4 (Pubitemid 28254790)
15. A. Vetushka and A. P. Ehiasarian, J. Phys. D: Appl. Phys. 41, 015204 (2008). 10.1088/0022-3727/41/1/015204 (Pubitemid 351153348)
16. S. Kadlec, C. Quaeyhaegens, G. Knuyt and L. M. Stals, Surf. Coat. Technol. 89, 177 (1997). 10.1016/S0257-8972(96)03088-5
17. A. Hecimovic, K. Burcalova and A. P. Ehiasarian, J. Phys. D: Appl. Phys. 41, 095203 (2008). 10.1088/0022-3727/41/9/095203 (Pubitemid 351591089)
18. J. Andersson, A. P. Ehiasarian and A. Anders, Appl. Phys. Lett. 93, 071504 (2008). 10.1063/1.2973179
19. I. Petrov, P. B. Barna, L. Hultman and J. E. Greene, J. Vac. Sci. Technol. A 21, S117 (2003). 10.1116/1.1601610
20. A. P. Ehiasarian, GB Patent No. 2437730A (2 May 2006).
21. R. Machunze, A. P. Ehiasarian, F. D. Tichelaar and G. C. A. M. Janssen, Thin Solid Films 518, 1561 (2009). 10.1016/j.tsf.2009.09.069
22. A. P. Ehiasarian, R. New, W.-D. Mnz, L. Hultman, U. Helmersson and V. Kouznetsov, Vacuum 65, 147 (2002). 10.1016/S0042-207X(01)00475-4 (Pubitemid 34284160)
23. A. Anders, J. Andersson and A. Ehiasarian, J. Appl. Phys. 102, 113303 (2007). 10.1063/1.2817812 (Pubitemid 350262075)
24. N. Hosokawa, T. Tsukada and H. Kitahara, in Proceedings of the 8th Int. Vacuum Congress, Le Vide, Cannes, France, 1980 (unpublished).
25. A. Anders, Appl. Phys. Lett. 92, 201501 (2008). 10.1063/1.2936307 (Pubitemid 351733866)
26. A. P. Ehiasarian, A. Vetushka, A. Hecimovic and S. Konstantinidis, J. Appl. Phys. 104 (2008). 10.1063/1.3000446
27. C. S. Shin, D. Gall, Y. W. Kim, N. Hellgren, I. Petrov and J. E. Greene, J. Appl. Phys. 92, 5084 (2002). 10.1063/1.1510558 (Pubitemid 35360693)
28. D. Gall, S. Kodambaka, M. A. Wall, I. Petrov and J. E. Greene, J. Appl. Phys. 93, 9086-9094 (2003). 10.1063/1.1567797
29. S. Mahieu and D. Depla, J. Phys D: Appl. Phys. 42, 053002 (2009). 10.1088/0022-3727/42/5/053002
30. Y. Makino, T. Tanaka, M. Nose, M. Misawa, A. Tanimoto, T. Nakai, K. Kato and K. Nogi, Surf. Coat. Technol. 98, 934 (1998). 10.1016/S0257-8972(97)00309-5
31. T. Suzuki, H. Saito, M. Hirai, H. Suematsu, W. H. Jiang and K. Yatsui, Thin Solid Films 407, 118 (2002). 10.1016/S0040-6090(02)00023-8 (Pubitemid 34524180)
32. P. Wilhartitz, S. Dreer and P. Ramminger, Thin Solid Films 447, 289 (2004). 10.1016/S0040-6090(03)01066-6
33. L. Castaldi, D. Kurapov, A. Reiter, V. Shkover, P. Schwaller and J. Patscheider, Surf. Coat. Technol. 203, 545 (2008). 10.1016/j.surfcoat.2008.05. 018
34. N. D. Telling, G. A. Jones, C. A. Faunce, P. J. Grundy, H. J. Blythe and D. E. Joyce, J. Vac. Sci. Technol. A 19, 405 (2001). 10.1116/1.1339016 (Pubitemid 32399805)
35. J. Narayan, P. Tiwari, X. Chen, J. Singh, R. Chowdhury and T. Zheleva, Appl. Phys. Lett. 61, 1290 (1992). 10.1063/1.107568
36. D. Br, personal communication (Sapientia University, Trgu Mures, Romania, 2010).
37. F. H. Baumann, D. L. Chopp, D. L. R. T. Diaz, G. H. Gilmer, J. E. Greene, H. Huang, S. Kodambaka, P. O'Sullivan and I. Petrov, MRS Bulletin 26 (Compendex), 182 (2001). 10.1557/mrs2001.40
38. J. E. Greene, J. E. Sundgren, L. Hultman, I. Petrov and D. B. Bergstrom, Appl. Phys. Lett. 67 (Compendex), 2928 (1995). 10.1063/1.114845
39. L. Hultman, U. Helmersson, S. A. Barnett, J.-E. Sundgren and J. E. Greene, J. Appl. Phys. 61, 552 (1987). 10.1063/1.338257
40. A. Barna, P. B. Barna, G. Radnoczi, F. M. Reicha and L. Toth, Phys. Status Solidi A 55, 427 (1979). 10.1002/pssa.v55:2
41. P. B. Barna, G. Radnczi and F. M. Reicha, Vacuum 38, 527 (1988). 10.1016/0042-207X(88)90013-9
42. P. B. Barna and M. Adamik, Thin Solid Films 317 (1-2), 27 (1998). 10.1016/S0040-6090(97)00503-8
43. S. Kadlec, Plasma Processes Polym. 4 (S1), S419 (2007). 10.1002/ppap.v4:3+
44. S. Kodambaka, J. Bareo, S. V. Khare, W. Swiech, I. Petrov and J. E. Greene, J. Appl. Phys. 98, 034901 (2005). 10.1063/1.1977193 (Pubitemid 41204835)
45. D. Adamovic, E. P. Munger, V. Chirita, L. Hultman and J. E. Greene, Appl. Phys. Lett. 86, 1 (2005). 10.1063/1.1940122 (Pubitemid 40861514)
46. H. Ljungcrantz, M. Oden, L. Hultman, J. E. Greene and J. E. Sundgren, J. Appl. Phys. 80, 6725 (1996). 10.1063/1.363799
47. K. Sarakinos, J. Alami, D. Severin, P. M. Karimi and M. Wuttig, Thin Solid Films 516, 4568 (2008). 10.1016/j.tsf.2007.06.016 (Pubitemid 351601580)