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Volumn 86, Issue 8, 2012, Pages 1036-1040

Selection of metal ion irradiation for controlling Ti 1-xAl xN alloy growth via hybrid HIPIMS/magnetron co-sputtering

Author keywords

HIPIMS; HPPMS; Ionized PVD; TiAlN

Indexed keywords

ALLOY GROWTH; ALN; COSPUTTERING; DC MAGNETRON SPUTTERING; HIGH HARDNESS; HIGH-POWER; HIPIMS; HPPMS; HYBRID APPROACH; IONIZED PVD; LOW HARDNESS; LOW STRESS; METAL TARGET; SHARP CONTRAST; TIALN;

EID: 84858153213     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.10.027     Document Type: Article
Times cited : (72)

References (23)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.