-
3
-
-
0000975178
-
A novel pulsed magnetron sputter technique utilizing very high target power densities
-
V. Kouznetsov, K. Macak, J.M. Schneider, U. Helmersson, and I. Petrov A novel pulsed magnetron sputter technique utilizing very high target power densities Surf Coat Tech 122 1999 290
-
(1999)
Surf Coat Tech
, vol.122
, pp. 290
-
-
Kouznetsov, V.1
MacAk, K.2
Schneider, J.M.3
Helmersson, U.4
Petrov, I.5
-
4
-
-
28944450080
-
Ionization of sputtered metals in high power pulsed magnetron sputtering
-
J. Böhlmark, J. Alami, C. Christou, A.P. Ehiasarian, and U. Helmersson Ionization of sputtered metals in high power pulsed magnetron sputtering J Vac Sci Technol A 23 2005 18
-
(2005)
J Vac Sci Technol A
, vol.23
, pp. 18
-
-
Böhlmark, J.1
Alami, J.2
Christou, C.3
Ehiasarian, A.P.4
Helmersson, U.5
-
5
-
-
84950555774
-
Gas density reduction effects in magnetrons
-
S.M. Rossnagel Gas density reduction effects in magnetrons J Vac Sci Technol A 6 1988 19
-
(1988)
J Vac Sci Technol A
, vol.6
, pp. 19
-
-
Rossnagel, S.M.1
-
7
-
-
84955036081
-
Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure
-
I. Petrov, L. Hultman, J.-E. Sundgren, and J.E. Greene Polycrystalline TiN films deposited by reactive bias magnetron sputtering: effects of ion bombardment on resputtering rates, film composition, and microstructure J Vac Sci Technol A 10 1992 265
-
(1992)
J Vac Sci Technol A
, vol.10
, pp. 265
-
-
Petrov, I.1
Hultman, L.2
Sundgren, J.-E.3
Greene, J.E.4
-
12
-
-
0025792680
-
Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method
-
T. Ikeda, and H. Satoh Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method Thin Solid Films 195 1991 99
-
(1991)
Thin Solid Films
, vol.195
, pp. 99
-
-
Ikeda, T.1
Satoh, H.2
-
14
-
-
84858151868
-
-
[accessed in September 2011]
-
http://www.cemecon.de/coating-technology/2-coating-units/ 25-cc-800sup-sup-9-hipims/index-eng.html, [accessed in September 2011].
-
-
-
-
18
-
-
33846622069
-
Interdependence between stress and texture in arc evaporated Ti-Al-N thin films
-
C.V. Falub, A. Karimi, M. Ante, and W. Kalss Interdependence between stress and texture in arc evaporated Ti-Al-N thin films Surf Coat Tech 201 2007 5891
-
(2007)
Surf Coat Tech
, vol.201
, pp. 5891
-
-
Falub, C.V.1
Karimi, A.2
Ante, M.3
Kalss, W.4
-
19
-
-
34547247620
-
xN hard coatings
-
DOI 10.1088/0022-3727/40/13/017, PII S002237270742856X, 017
-
xN hard coatings J Phys D Appl Phys 40 2007 4021 4026 (Pubitemid 47134609)
-
(2007)
Journal of Physics D: Applied Physics
, vol.40
, Issue.13
, pp. 4021-4026
-
-
Podgursky, V.1
-
20
-
-
36449000853
-
-
For common transition-metal nitrides, ν varies only from 0.17 for cubic AlN (see A.J. Wang et al. Computational Materials Science 48 (2010) 705-709) to 0.25 for TiN (cf. J.O. Kim et al. J. Appl. Phys. 72 (1992) 1805). Variation in ν over this range changes ψ by less than ±3°.
-
(1992)
J. Appl. Phys.
, vol.72
, pp. 1805
-
-
Kim, J.O.1
-
21
-
-
55749105697
-
xN (M = Ti, Cr, Sc, Hf): A first-principles study
-
xN (M = Ti, Cr, Sc, Hf): a first-principles study Surf Coat Tech 203 2008 883
-
(2008)
Surf Coat Tech
, vol.203
, pp. 883
-
-
Alling, B.1
Karimi, A.2
Abrikosov, I.A.3
-
22
-
-
0036655899
-
Nanoindentation hardness and elastic moduli of bulk single-crystal AlN
-
I. Yonenaga, T. Shima, and H.F.S. Marcel Nanoindentation hardness and elastic moduli of bulk single-crystal AlN Jpn J Appl Phys 41 2002 4620 4621
-
(2002)
Jpn J Appl Phys
, vol.41
, pp. 4620-4621
-
-
Yonenaga, I.1
Shima, T.2
Marcel, H.F.S.3
-
23
-
-
0024607854
-
Microstructure modification of TiN by ion bombardment during reactive sputter deposition
-
I. Petrov, L. Hultman, U. Helmersson, J.E. Sundgren, and J.E. Greene Microstructure modification of TiN by ion bombardment during reactive sputter deposition Thin Solid Films 169 1989 299
-
(1989)
Thin Solid Films
, vol.169
, pp. 299
-
-
Petrov, I.1
Hultman, L.2
Helmersson, U.3
Sundgren, J.E.4
Greene, J.E.5
|